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OskiCat is the catalog for UC Berkeley and includes all libraries on campus. Start with a keyword search, and then use subject headings for additional searching. The records will tell you the call number and location (library) for each book.
Some suggested books for learning more about semiconductor processing and devices include:
Compound Semiconductor Technology / D. J. Colliver. Artech House, 1976.
TK7871.99.C65.C64 1976
Electronic Materials Science for Integrated Circuits in Si and GaAs / J. W. Mayer, S. S. Lau. Macmillan, 1990.
TK7871.9.M388 1990
Fundamentals of Semiconductors : Physics and Materials Properties / Peter Y. Yu, Manuel Cardona. 1st ed., corr. print. Springer, 1996.
QC611.Y88 1996b Reserve
3rd edition available online (UCB access only)
4th edition available online (UCB access only)
Introduction to Microelectronic Fabrication / R. C. Jaeger. 2nd ed. Prentice-Hall, 2002.
TK7874.J33 2002
Introduction to Solid State Physics / C. Kittel. 7th ed. Wiley, 1996.
QC176.K531 1996 (Physics-Astronomy Library)
Introduction to Solid State Physics / Charles Kittel. 8th ed. Wiley, c2005.
QC176.K5 2005
Nanostructures and Nanomaterials : Synthesis, Properties and Applications / Guozhong Cao. Imperial College Press, c2004.
QC176.8.N35.C36 2004
Available online (UCB access only)
The Physics and Chemistry of Materials / Joel I. Gersten, Frederick W. Smith. Wiley, c2001.
QD478.G47 2001
Physics of Semiconductor Devices / S. M. Sze. 3rd ed. Wiley, 2007.
TK7871.85.S988 2007
Principles of Growth and Processing of Semiconductors / S. Mahajan, K. S. Sree Harsha. McGraw-Hill, 1999.
TK7871.85.M295 1999
The Science and Engineering of Microelectronic Fabrication / S. A. Campbell. 3rd ed. Oxford University Press, 2008.
TK7871.85.C25 2008
Semiconductor Silicon Crystal Technology / F. Shimura. Academic Press, 1988.
TK7871.85.S5231 1988
VLSI Fabrication Principles: Silicon and Gallium Arsenide / S. K. Ghandhi. 2nd ed. Wiley, 1994.
TK7874.G473 1994
VLSI Technology / S. M. Sze (editor). 2nd ed. McGraw-Hill, 1988.
TK7874.V5661 1988
eBooks
A keyword searchable collection of engineering handbooks and textbooks from CRC Press, a major science and engineering publisher. The collection is also browsable, and includes a category on nanoscience/nanotechnology.
A collection of full-text engineering and scientific handbooks and databases, with built-in software tools.
Online handbooks
Many of our handbooks and encyclopedias are available online. See our ebooks page for more encyclopedias and handbooks.
Encyclopedia of Materials: Science and Technology 2001. Edited by K.H. Jurgen Buschow. Read at Google Read at Google
CRC Handbook of Chemistry and Physics 91st Ed. 2010-2011. Read at Google Read at Google
CRC Materials Science and Engineering Handbook 3rd Ed. 2001. Edited by Janes F. Shackelford and William Alexander Read at Google Read at Google