MAT SCI 123: Semiconductor Processing

Your Librarian

  • Lisa Ngo
  • Office Hours: By appointment
  • Office Location: 110 Bechtel Engineering Center
  • Contact Info:

    510.643.4299

About this Guide

A guide to literature searching for MSE123.

Presentation Slides

You do allow embedded content.

Off-campus Access

To access UCB Library resources from off campus, configure your machine using one of two simple methods (Proxy Server is the quickest and easiest):

Proxy Server
After you make a one-time change in your web browser settings, the proxy server will ask you to log in with a CalNet ID when you click on the link to a licensed resource. See the setup instructions, FAQ, and Troubleshooting pages to configure your browser.  Follow these steps to check your proxy configuration.

VPN (Virtual Private Network)
After you install and run the VPN client software on your computer, you can log in with a CalNet ID to establish a secure connection with the campus network.

Find Books and More

OskiCat is the catalog for UC Berkeley and includes all libraries on campus. Start with a keyword search, and then use subject headings for additional searching. The records will tell you the call number and location (library) for each book.

Some suggested books for learning more about semiconductor processing and devices include:

Compound Semiconductor Technology / D. J. Colliver. Artech House, 1976.
TK7871.99.C65.C64 1976

Electronic Materials Science for Integrated Circuits in Si and GaAs / J. W. Mayer, S. S. Lau. Macmillan, 1990.
TK7871.9.M388 1990

Fundamentals of Semiconductors : Physics and Materials Properties / Peter Y. Yu, Manuel Cardona. 1st ed., corr. print. Springer, 1996.
QC611.Y88 1996b Reserve
3rd edition available online  (UCB access only)
4th edition available online  (UCB access only)

Introduction to Microelectronic Fabrication / R. C. Jaeger. 2nd ed. Prentice-Hall, 2002.
TK7874.J33 2002

Introduction to Solid State Physics / C. Kittel. 7th ed. Wiley, 1996.
QC176.K531 1996 (Physics-Astronomy Library)

Introduction to Solid State Physics / Charles Kittel. 8th ed. Wiley, c2005.
QC176.K5 2005

Nanostructures and Nanomaterials : Synthesis, Properties and Applications / Guozhong Cao. Imperial College Press, c2004.
QC176.8.N35.C36 2004
Available online  (UCB access only)

The Physics and Chemistry of Materials / Joel I. Gersten, Frederick W. Smith. Wiley, c2001.
QD478.G47 2001

Physics of Semiconductor Devices / S. M. Sze. 3rd ed. Wiley, 2007.
TK7871.85.S988 2007

Principles of Growth and Processing of Semiconductors / S. Mahajan, K. S. Sree Harsha. McGraw-Hill, 1999.
TK7871.85.M295 1999

The Science and Engineering of Microelectronic Fabrication / S. A. Campbell. 3rd ed. Oxford University Press, 2008.
TK7871.85.C25 2008

Semiconductor Silicon Crystal Technology / F. Shimura. Academic Press, 1988.
TK7871.85.S5231 1988

VLSI Fabrication Principles: Silicon and Gallium Arsenide / S. K. Ghandhi. 2nd ed. Wiley, 1994.
TK7874.G473 1994

VLSI Technology / S. M. Sze (editor). 2nd ed. McGraw-Hill, 1988.
TK7874.V5661 1988

eBooks

crcnetbase logo
A keyword searchable collection of engineering handbooks and textbooks from CRC Press, a major science and engineering publisher. The collection is also browsable, and includes a category on nanoscience/nanotechnology.

knovel logo
A collection of full-text engineering and scientific handbooks and databases, with built-in software tools.

More eBooks

Online handbooks

Many of our handbooks and encyclopedias are available online. See our ebooks page for more encyclopedias and handbooks.


Encyclopedia of Materials: Science and Technology 2001. Edited by K.H. Jurgen Buschow. Read at Google Read at Google


CRC Handbook of Chemistry and Physics 91st Ed. 2010-2011. Read at Google Read at Google


CRC Materials Science and Engineering Handbook 3rd Ed. 2001. Edited by Janes F. Shackelford and William Alexander Read at Google Read at Google

Find Articles

Journal articles and conference papers are the primary means of disseminating research in engineering. Use these article databases to find journal articles and conference papers relevant to your research.

Conference Papers

Conference proceedings and papers may be published in various ways: as separate, one-time publications; as serials; or as special issues in journals. Sometimes only the abstract is published; sometimes the paper may be obtained only by contacting the author or society; sometimes the full text is on the web. Occasionally the papers are never published but may be cited by authors who attended the meetings. As a result of these variations, locating conference proceedings can be complicated.

If you're having trouble finding a conference paper, consult our How to Find Conference Proceedings guide, or contact us at the Engineering Library.

Selected Research Journals

Browse research journals in your field to identify interesting topics.

Find call numbers and locations for print copies by searching the journal titles in OskiCat.

Selected Semiconductor Journals

Selected Related Journals

Citation Management Tools

Citation management tools help you manage your research, collect and cite sources, and create bibliographies in a variety of citation styles.  Each one has its strengths and weaknesses, but any are easier than doing it by hand!

  1. RefWorks - free for UC Berkeley users. It allows you to create your own database by importing references and using them for footnotes and bibliographies. Use the RefWorks New User Form to sign up.

  2. EndNote: may be purchased from UC Berkeley's Software Central.Supports many citations styles in science and engineering.

  3. Zotero: A free plug-in that works exclusively with the Firefox browser: keeps copies of what you find on the web, permits tagging, notation, full text searching of your library of resources, works with Word, and has a free web backup service.

It's always good to double check the formatting -- sometimes the software doesn't get it quite right.

Engineering Library

Address: 110 Bechtel Engineering Center

Semester Hours
M-Th 8 am - 10 pm
F 8 am - 5 pm
Sat 1 pm - 5 pm
Sun 1 pm - 10 pm

Phone: 510.642.3366

All library hours

Chat Reference Help

You do allow embedded content.

Related Guides

Email Guide Owner
Subcribe to RSS RSS Feed
add to bookmark Bookmark This

Go To Full Version